Laser ablation is the process of separating or removing material from surfaces by a laser beam. A femtosecond laser is a powerful tool for localized material ablation with high processing accuracy and cleanliness.
Different materials have different damage thresholds for optical breakdown. Therefore, adjusted pulse energy from a femtosecond laser enables complete removal of the top layer with minimal damage to the substrate.
Selective ablation can be applied, for example, to fabricate crystalline microresonators of high-quality factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Here, chromium with a thickness of 600 nm was ablated without damaging the underneath LNOI.
- 190 fs – 20 ps tunable pulse duration
- 2 mJ maximum pulse energy
- 80 W maximum output power
- Single-shot – 2 MHz repetition rate
- Air-cooled version
- 100 fs – 20 ps tunable pulse duration
- 3 mJ maximum pulse energy
- 20 W maximum output power
- Single-shot – 1 MHz repetition rate
- Automated harmonic generators (up to 5th harmonic)
Direct correlation of local fluence to single-pulse ultrashort laser ablated morphology
H. Sakurai, K. Konishi, H. Tamaru, J. Yumoto, and M. Kuwata‑Gonokami, Communications Materials 1 (2) (2021).
Dual Channel Microfluidics for Mimicking the Blood–Brain Barrier
B. Buchroithner, S. Mayr, F. Hauser, E. Priglinger, H. Stangl, A. R. Santa‑Maria, M. A. Deli, A. Der, T. A. Klar, M. Axmann et al., 2 (15), 2984-2993 (2021).
Functional surface formation by efficient laser ablation using single-pulse and burst-modes
A. Žemaitis, M. Gaidys, J. Mikšys, P. Gečys, and M. Gedvilas, in Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI, C. Molpeceres, A. Narazaki et al., eds. (SPIE, 2021).
Efficient ablation by ultra-short pulse lasers
A. Žemaitis, P. Gečys, G. Račiukaitis, and M. Gedvilas, Procedia CIRP 94, 962-965 (2020).
Femtosecond laser direct writing of perovskite patterns with whispering gallery mode lasing
X. Tian, Y. Xu, H. Zhao, X. Qin, Y. Nie, W. Li, S. Liu, Q. Lin, and Q. Cao, Journal of Materials Chemistry C 22 (8), 7314-7321 (2020).
Micromachining of Invar Foils with GHz, MHz and kHz Femtosecond Burst Modes
S. Butkus, V. Jukna, D. Paipulas, M. Barkauskas, and V. Sirutkaitis, Micromachines 8 (11), 733 (2020).
Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator
J. Zhang, Z. Fang, J. Lin, J. Zhou, M. Wang, R. Wu, R. Gao, and Y. Cheng, Nanomaterials 9 (9), 1218 (2019).